2 × 1 m2, with the edges of the electrodes assumed to be open. Usually, plasma equipment is designed so that the edge of the electrode is not exposed to the plasma. Sometimes, the edges of the electrode will be supported by dielectric materials such as quartz and ceramics, in which case

the edges are terminated by the capacitance formed by the dielectrics. In such a case, in order to minimize the power loss, the electrode supporting system will be designed so that the capacitance becomes as small as possible, in which case the impedance is close to that of the open case. The electrode was divided into small elements of which the size is 0.01 × 0.01 m (ΔX = ΔY = 0.01 m). Both C p and G p are assumed to stay constant with relatively small variation in the electrode voltage. C p and G p values

were calculated from the measured impedance of atmospheric-pressure helium plasma (Z p) shown click here in Figure 2. Table 2 shows the plasma impedance Z p, admittance Y p, and (parallel) capacitance C p used for the calculations. The propagation constant γ and the wavelength λ are also shown. It is seen that the wavelength λ on the electrode is considerably shorter than that in free space. Table 2 Measured impedances of atmospheric-pressure helium LXH254 solubility dmso plasma[7]   150 MHz (378.2 W/cm3) 13.56 MHz (370.5 W/cm3) Z p = R p ′ + X p j (ohm/m2) 0.060 – 0.049 j 0.038 – 0.033 j Y p = G p + B p j (1/(ohm m2)) 9.96 + 8.25 j 15.0 + 13.0 j C p (F/m2) 8.75 × 10−9 1.53 × 10−7 γ ≡ α + βj 1.69 + 3.54 j 0.62 + 1.32 j λ(m) 1.77 (2 m in free space) 4.78 (22.1 m in free space) Electrode diameter, 1 cm; electrode gap, 1 mm. Figure 4 shows the calculated two-dimensional distribution of the voltage amplitude at each point on the electrode during plasma generation. The

power was applied at the center of the electrode. Figure 4 Two-dimensional distribution of voltage amplitude on the electrode during plasma generation. Power was applied at the center of the electrode. (a) 150 MHz and (b) 13.56 MHz. The central cross-sectional distributions of the plots in Figure 4 are shown in Figure 5, where voltage distribution is along the central cross-sectional line in the direction of electrode length. learn more Voltages oscillate between their maximum and minimum with the driving frequency. Dotted lines in Figure 5 show instantaneous voltage profiles at elapsed times of 9.35 and 181.77 ns for 150 and 13.56 MHz, respectively. They SB273005 cost always remain between the maximum voltage (upper solid line) and the minimum voltage (lower solid line). It is clearly seen that voltage variation is considerably larger for 150 MHz than for 13.56 MHz. The voltage variation over the electrode is approximately 58% and 12% for 150 and 13.56 MHz, respectively. Figure 5 Voltage distributions along the central cross-sectional line on the electrode. Power was applied at the center of the electrode.